Reliability of MEMS: Testing of Materials and Devices, Volume 6
by Series Editor: Oliver Brand (Georgia Institute of Technology, Atlanta, USA); Series Editor: Gary K. Fedder (Carnegie Mellon University, Pittsburgh, USA); Series Editor: Christofer Hierold (ETH Zurich, Zurich, Switzerland); Series Editor: Jan G. KFormat: eBook
Pub. Date: 2008-11-01
Publisher(s): Wiley-VCH
Availability: This title is currently not available.
Other versions by this Author
List Price: $255.00
Rent Textbook
Select for Price
New Textbook
We're Sorry
Sold Out
Used Textbook
We're Sorry
Sold Out
eTextbook
We're Sorry
Not Available
Summary
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
An electronic version of this book is available through VitalSource.
This book is viewable on PC, Mac, iPhone, iPad, iPod Touch, and most smartphones.
By purchasing, you will be able to view this book online, as well as download it, for the chosen number of days.
Digital License
You are licensing a digital product for a set duration. Durations are set forth in the product description, with "Lifetime" typically meaning five (5) years of online access and permanent download to a supported device. All licenses are non-transferable.
More details can be found here.
A downloadable version of this book is available through the eCampus Reader or compatible Adobe readers.
Applications are available on iOS, Android, PC, Mac, and Windows Mobile platforms.
Please view the compatibility matrix prior to purchase.